Home About Browse Search
Svenska


Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition

Samii, Rouzbeh and Zanders, David and Buttera, Sydney C. and Kessler, Vadim and Ojamae, Lars and Pedersen, Henrik and O'Brien, Nathan J. (2021). Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition. Inorganic Chemistry. 60 , 4578-4587
[Research article]

[img] PDF
2MB

Abstract

Amidinate and guanidinate ligands have been used extensively to produce volatile and thermally stable precursors for atomic layer deposition. The triazenide ligand is relatively unexplored as an alternative ligand system. Herein, we present six new Al(III) complexes bearing three sets of a 1,3-dialkyltriazenide ligand. These complexes volatilize quantitatively in a single step with onset volatilization temperatures of similar to 150 degrees C and 1 Torr vapor pressures of similar to 134 degrees C. Differential scanning calorimetry revealed that these Al(III) complexes exhibited exothermic events that overlapped with the temperatures of their mass loss events in thermogravimetric analysis. Using quantum chemical density functional theory computations, we found a decomposition pathway that transforms the relatively large hexacoordinated Al(III) precursor into a smaller dicoordinated complex. The pathway relies on previously unexplored interligand proton migrations. These new Al(III) triazenides provide a series of alternative precursors with unique thermal properties that could be highly advantageous for vapor deposition processes of Al containing materials.

Authors/Creators:Samii, Rouzbeh and Zanders, David and Buttera, Sydney C. and Kessler, Vadim and Ojamae, Lars and Pedersen, Henrik and O'Brien, Nathan J.
Title:Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition
Series Name/Journal:Inorganic Chemistry
Year of publishing :2021
Volume:60
Page range:4578-4587
Number of Pages:10
Publisher:AMER CHEMICAL SOC
ISSN:0020-1669
Language:English
Publication Type:Research article
Article category:Scientific peer reviewed
Version:Published version
Copyright:Creative Commons: Attribution 4.0
Full Text Status:Public
Subjects:(A) Swedish standard research categories 2011 > 1 Natural sciences > 104 Chemical Sciences > Inorganic Chemistry
URN:NBN:urn:nbn:se:slu:epsilon-p-112144
Permanent URL:
http://urn.kb.se/resolve?urn=urn:nbn:se:slu:epsilon-p-112144
Additional ID:
Type of IDID
DOI10.1021/acs.inorgchem.0c03496
Web of Science (WoS)000637850300045
ID Code:24425
Faculty:NJ - Fakulteten för naturresurser och jordbruksvetenskap
Department:(NL, NJ) > Department of Molecular Sciences
Deposited By: SLUpub Connector
Deposited On:08 Jun 2021 13:24
Metadata Last Modified:08 Jun 2021 13:31

Repository Staff Only: item control page

Downloads

Downloads per year (since September 2012)

View more statistics

Downloads
Hits