Samii, Rouzbeh and Zanders, David and Buttera, Sydney C. and Kessler, Vadim and Ojamae, Lars and Pedersen, Henrik and O'Brien, Nathan J.
(2021).
Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition.
Inorganic Chemistry. 60
, 4578-4587
[Research article]
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Abstract
Amidinate and guanidinate ligands have been used extensively to produce volatile and thermally stable precursors for atomic layer deposition. The triazenide ligand is relatively unexplored as an alternative ligand system. Herein, we present six new Al(III) complexes bearing three sets of a 1,3-dialkyltriazenide ligand. These complexes volatilize quantitatively in a single step with onset volatilization temperatures of similar to 150 degrees C and 1 Torr vapor pressures of similar to 134 degrees C. Differential scanning calorimetry revealed that these Al(III) complexes exhibited exothermic events that overlapped with the temperatures of their mass loss events in thermogravimetric analysis. Using quantum chemical density functional theory computations, we found a decomposition pathway that transforms the relatively large hexacoordinated Al(III) precursor into a smaller dicoordinated complex. The pathway relies on previously unexplored interligand proton migrations. These new Al(III) triazenides provide a series of alternative precursors with unique thermal properties that could be highly advantageous for vapor deposition processes of Al containing materials.
Authors/Creators: | Samii, Rouzbeh and Zanders, David and Buttera, Sydney C. and Kessler, Vadim and Ojamae, Lars and Pedersen, Henrik and O'Brien, Nathan J. | ||||||
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Title: | Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition | ||||||
Series Name/Journal: | Inorganic Chemistry | ||||||
Year of publishing : | 2021 | ||||||
Volume: | 60 | ||||||
Page range: | 4578-4587 | ||||||
Number of Pages: | 10 | ||||||
Publisher: | AMER CHEMICAL SOC | ||||||
ISSN: | 0020-1669 | ||||||
Language: | English | ||||||
Publication Type: | Research article | ||||||
Article category: | Scientific peer reviewed | ||||||
Version: | Published version | ||||||
Copyright: | Creative Commons: Attribution 4.0 | ||||||
Full Text Status: | Public | ||||||
Subjects: | (A) Swedish standard research categories 2011 > 1 Natural sciences > 104 Chemical Sciences > Inorganic Chemistry | ||||||
URN:NBN: | urn:nbn:se:slu:epsilon-p-112144 | ||||||
Permanent URL: | http://urn.kb.se/resolve?urn=urn:nbn:se:slu:epsilon-p-112144 | ||||||
Additional ID: |
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ID Code: | 24425 | ||||||
Faculty: | NJ - Fakulteten för naturresurser och jordbruksvetenskap | ||||||
Department: | (NL, NJ) > Department of Molecular Sciences | ||||||
Deposited By: | SLUpub Connector | ||||||
Deposited On: | 08 Jun 2021 13:24 | ||||||
Metadata Last Modified: | 08 Jun 2021 13:31 |
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